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Products Features
1、 Ultra precision motion performance
The repeated positioning accuracy is less than 0.2 μ m, and the absolute positioning accuracy reaches 1.5 μ m, meeting the requirements of high-precision scenarios such as semiconductor detection
Built in 1nm resolution linear encoder for real-time closed-loop control of the entire stroke, ensuring motion stability. And with high-speed dynamic response, the equipment's cycle efficiency is significantly improved
2、 Innovative structural design
Modular drive system, supporting USB/serial port connection or parallel drive configuration, multi axis devices can be powered in series through a single cable, coupled with a controller to achieve multi axis coordinated motion, simplifying complex system integration, optimizing vertical installation, adopting magnetic balance technology, special guide rail structure to enhance rigidity, and high load capacity.
3、 Environmental adaptability advantage
Clean production, no mechanical transmission losses, zero noise and dust emissions during operation, in compliance with clean standards for semiconductor/LCD panel manufacturing, with a long service life.
Low maintenance requirements, eliminating intermediate transmission mechanisms such as belts and screws to reduce mechanical failure points.
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Products Application
Precision manufacturing: semiconductor wafer positioning, optical component calibration
Automation equipment: CNC machine tool control, 3D printing precision platform
Research instruments: microscope stage displacement, high-precision adjustment of experimental equipment.
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Product Detail
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Produktparameter
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